Aberration Reduction of Si Diaphragm Dynamic Focusing Mirror.

• 1 January 1995
• journal article
• Published by Japan Society for Precision Engineering in Journal of the Japan Society for Precision Engineering
• Vol. 61  (5) , 697-701
• https://doi.org/10.2493/jjspe.61.697

Abstract

Keywords

• ABERRATION REDUCTION
• DIAPHRAGM DYNAMIC
• SI DIAPHRAGM
• DYNAMIC FOCUSING
• FOCUSING MIRROR