Effect of He Gas on Reactive Sputtered Film Growth.

• 1 January 1993
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 36  (3) , 344-346
• https://doi.org/10.3131/jvsj.36.344

Abstract

Keywords

• FILM GROWTH
• GAS
• EFFECT
• REACTIVE SPUTTERED FILM