Low-Temperature Fabrication of High-Coercivity L10 Ordered FePt Magnetic Thin Films by Sputtering
- 1 December 2001
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 40 (12B) , L1367-1369
- https://doi.org/10.1143/jjap.40.l1367
Abstract
We report that fully ordered L10 FePt magnetic thin films with high coercivity can be fabricated by a simple sputtering method at a substrate temperature of 300°C. Although fcc→L10 ordering proceeds only above 600°C in ex situ annealing of disordered FePt films, the ordering occurs spontaneously by surface diffusion during the sputtering process of FePt alloy upon heating the substrate at 300°C. High coercivity larger than 7 kOe was achieved from the as-sputtered state.Keywords
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