Determination of Young's Modulus of Thin Films
- 1 October 1992
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 75 (10) , 2915-2917
- https://doi.org/10.1111/j.1151-2916.1992.tb05533.x
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Elastic constants of amorphous thin films in the systems SiO2Al2O3 and AlPO4Al2O3Journal of Non-Crystalline Solids, 1989
- Superplasticity of Yttria-Stabilized Tetragonal ZrO2PolycrystalsAdvanced Ceramic Materials, 1986
- Young’s modulus measurements of thin films using micromechanicsJournal of Applied Physics, 1979