Micromachining and Image Recording on Thin Films by Laser Beams
- 8 July 1971
- journal article
- website
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Bell System Technical Journal
- Vol. 50 (6) , 1761-1789
- https://doi.org/10.1002/j.1538-7305.1971.tb02581.x
Abstract
A theoretical and experimental description of laser machining of thin metallic films is given. Calculations are carried out for the temperature rise of a thin film in response to a pulse of incident light energy and for the dependence of the temperat...Keywords
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