Production of ions in open-ended region of coaxial-type microwave cavity
- 1 April 1992
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 63 (4) , 2565-2567
- https://doi.org/10.1063/1.1142890
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Plasma properties in the open-ended region of a coaxial-type microwave cavityReview of Scientific Instruments, 1991
- Current status of development of ion sources in Japan from a standpoint of materials science (invited)Review of Scientific Instruments, 1990