Novel oxygen source for ultrahigh vacuum studies
- 1 April 1982
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 20 (4) , 1056-1059
- https://doi.org/10.1116/1.571541
Abstract
High-temperature solid oxide electrolyte (e.g., yttria-stabilized zirconia) cells are compatible with ultrahigh vacuum systems. Since the oxygen activity at the electrode/electrolyte interface is controlled precisely by the applied potential, the cells are ideal as oxygen sources for UHV studies. A three-electrode oxide electrolyte cell has been constructed and incorporated into a UHV surface analysis chamber. The control of the cell is extremely sensitive, and it can be used either to maintain a constant oxygen pressure or to pulse oxygen similar to a molecular beam source in the UHV chamber.Keywords
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