Laser microfabrication of optical circuits in LiNbO3
- 12 September 1988
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 53 (11) , 947-949
- https://doi.org/10.1063/1.100648
Abstract
Optical waveguides have been fabricated in x‐cut LiNbO3 by direct laser patterning of ‘‘spin‐on’’ organometallic inks. The technique has been used to repeatedly and rapidly produce single‐ and multimode waveguide structures, such as lines, y branches, and couplers. In addition, an entirely laser‐delineated Mach–Zehnder interferometric modulator has been fabricated.Keywords
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