MOCVD Routes to Thin Metal Oxide Films for superconducting electronics
- 1 October 1994
- journal article
- review article
- Published by Wiley in Advanced Materials
- Vol. 6 (10) , 719-730
- https://doi.org/10.1002/adma.19940061003
Abstract
Superconducting, semiconducting and insulating oxide thin filmsare of interest for applications as active and passive components in microelectronic device technologies. Metal organic chemical vapor deposition (MOCVD) is an important method of thin film production and its use in developing device structures such as that in the figure is discussed. magnified imageKeywords
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