The use of surface profilometers for the measurement of wafer curvature

• 1 July 1988
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 6  (4) , 2570-2571
• https://doi.org/10.1116/1.575550

Abstract

Keywords

• WAFER CURVATURE
• SURFACE PROFILOMETERS
• USE OF SURFACE
• MEASUREMENT OF WAFER