Alternative Gate Dielectrics for Microelectronics
- 1 March 2002
- journal article
- Published by Springer Nature in MRS Bulletin
- Vol. 27 (3) , 186-191
- https://doi.org/10.1557/mrs2002.70
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- High-κ gate dielectrics: Current status and materials properties considerationsJournal of Applied Physics, 2001