Microlens lithography and smart masks
- 28 February 1997
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 35 (1-4) , 513-516
- https://doi.org/10.1016/s0167-9317(96)00199-2
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Microlens array imaging system for photolithographyOptical Engineering, 1996
- Transferring resist microlenses into silicon by reactive ion etchingOptical Engineering, 1996
- Technique for monolithic fabrication of microlens arraysApplied Optics, 1988