Formation of 2H-Type SiC Films by Reactive Sputtering

• 1 April 1972
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 11  (4) , 607-608
• https://doi.org/10.1143/jjap.11.607

Abstract

Keywords

• 2H TYPE
• REACTIVE SPUTTERING
• FORMATION
• FILMS BY REACTIVE
• TYPE SIC FILMS