Formation of YBa2Cu3O7 superconducting films by ion implantation
- 16 May 1988
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 52 (20) , 1729-1731
- https://doi.org/10.1063/1.99714
Abstract
We have fabricated superconducting thin films by ion implanting Y into a base material formed by the coevaporation of BaF2 and Cu. The implantations were carried out at 77 K and resulted in the formation of an amorphous Y‐Ba‐Cu‐F surface layer. Oxygen annealing with the addition of water vapor renders the base material insulating with a room‐temperature resistance of 105 Ω. An identical annealing treatment on the Y‐implanted material produces a superconductor with an onset temperature of 85 K.Keywords
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