Formation of YBa2Cu3O7 superconducting films by ion implantation

Abstract
We have fabricated superconducting thin films by ion implanting Y into a base material formed by the coevaporation of BaF2 and Cu. The implantations were carried out at 77 K and resulted in the formation of an amorphous Y‐Ba‐Cu‐F surface layer. Oxygen annealing with the addition of water vapor renders the base material insulating with a room‐temperature resistance of 105 Ω. An identical annealing treatment on the Y‐implanted material produces a superconductor with an onset temperature of 85 K.