Real-time precision refractometry: new approaches
- 20 February 1997
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 36 (6) , 1223-1234
- https://doi.org/10.1364/ao.36.001223
Abstract
We introduce two new approaches for near-real-time, high-precision tracking of the refractive index of the ambient atmosphere. The methods can be realized at low cost and are expected to have important practical application in those accurate dimensional metrology applications employing interferometry in air. A valuable potential application is the control of step-and-repeat mask positioning for integrated circuit production in which temporal stability time scales over days can be crucial. Extension of the methods to absolute index measurement is discussed.Keywords
This publication has 14 references indexed in Scilit:
- Precise laser frequency scanning using frequency-synthesized optical frequency sidebands: application to isotope shifts and hyperfine structure of mercuryJournal of the Optical Society of America B, 1989
- The results of a comparison between calculated and measured values of the refractive index of airJournal of Physics E: Scientific Instruments, 1988
- Update of the Edlén Formulae for the Refractive Index of AirMetrologia, 1988
- Measurements of the Refractive Index of Air Using Interference RefractometersMetrologia, 1986
- The Refractivity of AirJournal of Research of the National Bureau of Standards, 1981
- Optical Refractive Index of Air: Dependence on Pressure, Temperature and CompositionApplied Optics, 1967
- The Refractive Index of AirMetrologia, 1966
- Frequency stabilization of gas lasersIEEE Journal of Quantum Electronics, 1965
- Numerical Evaluation of the Intensity Curve of a Multiple-Beam Fizeau FringeJournal of the Physics Society Japan, 1953
- The refraction and dispersion of air and dispersion of air for the visible spectrumPhilosophical Transactions of the Royal Society of London. Series A, Mathematical and Physical Sciences, 1939