A Nondestructive Method for Examining Compositional and Doping Variations in GaAs ‐ GaAlAs Heterostructure Material Using a Scanning Electron Microscope
- 1 June 1975
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 122 (6) , 832-835
- https://doi.org/10.1149/1.2134334
Abstract
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