Focused ion beam applications to solid state devices

• 1 September 1996
• journal article
• Published by IOP Publishing in Nanotechnology
• Vol. 7  (3) , 247-258
• https://doi.org/10.1088/0957-4484/7/3/013

Abstract

Keywords

• BEAM APPLICATIONS
• STATE DEVICES
• FOCUSED ION BEAM
• SOLID