Integrated micro-optomechanical laser beam deflector

30 April 1998

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 34 (9) , 881-882
https://doi.org/10.1049/el:19980594

Abstract

A laser beam microdeflector which is fully integrated on a silicon substrate is presented. The design combines a steering system of cylindrical microlenses and a set of electrostatic combs. Both mechanical and optical parts are etched into a silica layer to provide a simple technological process and widen the operational wavelength range. Furthermore, the design, associated with silicon surface micromachining technology, enables more than 700 chips to be produced on a 100 mm diameter wafer.

Keywords

SI-SIO2
SI SURFACE MICROMACHINING TECHNOLOGY
ELECTROSTATIC COMBS
INTEGRATED LASER BEAM DEFLECTOR
MICRO-OPTOMECHANICAL DEFLECTOR
CYLINDRICAL MICROLENSES
SIO2
STEERING SYSTEM
MICRODEFLECTOR
SILICA LAYER
LASER BEAM DEFLECTOR
SI SUBSTRATE

This publication has 1 reference indexed in Scilit:

Integrated electrostatic micro-switch for opticalfibre networks driven by low voltage
Electronics Letters, 1996