Cone-shaped metal–insulator–semiconductor cathode for vacuum microelectronics

• 1 May 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 14  (3) , 1970-1972
• https://doi.org/10.1116/1.588966

Abstract

Keywords

• CONE SHAPED
• INSULATOR
• SHAPED METAL
• VACUUM MICROELECTRONICS
• SEMICONDUCTOR CATHODE