The Physics of Ohmic Contacts to SiC

• 1 July 1997
• journal article
• research article
• Published by Wiley in Physica Status Solidi (b)
• Vol. 202  (1) , 581-603
• https://doi.org/10.1002/1521-3951(199707)202:1<581::aid-pssb581>3.0.co;2-m

Abstract

Keywords

• REFRACTORY
• SIC
• OHMIC CONTACT
• SCHOTTKY
• SILICIDE
• SCHEMES
• FABRICATED
• PREDOMINATELY