Selective Doping of 6H-SiC by Diffusion of Boron

• 10 May 2000
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 338-342, 945-948
• https://doi.org/10.4028/www.scientific.net/msf.338-342.945

Abstract

Keywords

• CATHODOLUMINESCENCE
• DIFFUSION
• GRAPHITE MASK
• PHOTOLUMINESCENCE (PL)
• SELECTIVE DOPING