Microelectromechanical systems based on ferroelectric thin films
- 1 December 1995
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 29 (1-4) , 51-58
- https://doi.org/10.1016/0167-9317(95)00114-x
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Pyroelectric PbTiO3 thin films for microsensor applicationsSensors and Actuators A: Physical, 1992
- Cooperative development of a piezoresistive pressure sensor with integrated signal conditioning for automotive and industrial applicationsSensors and Actuators A: Physical, 1990
- A piezoelectric micropump based on micromachining of siliconSensors and Actuators, 1988