Two-Dimensional Surface-Emitting Arrays Of GaAs/AlGaAs Diode Lasers

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Abstract
Three approaches to fabricating two-dimensional surface-emitting GaAs/AlGaAs diode laser arrays are discussed: a hybrid approach in which linear arrays of edge-emitting lasers with cleaved end facets are mounted on microchanneled Si heatsinks with integral 45° deflecting mirrors, a monolithic approach in which edge-emitting lasers are fabricated with deflecting mirrors adjacent to both end facets of each laser, and a monolithic approach in which horizontal-cavity lasers are fabricated with intracavity 45° deflecting mirrors. In both monolithic approaches, all the laser facets and deflecting mirrors are fabricated by ion-beam-assisted etching.

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