IOTA, a new computer controlled thin film thickness measurement tool
- 30 April 1972
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 15 (4) , 371-380
- https://doi.org/10.1016/0038-1101(72)90107-4
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Optical thickness measurement of SiO2Si3N4 films on siliconSolid-State Electronics, 1967
- Nondestructive Determination of Thickness and Refractive Index of Transparent FilmsIBM Journal of Research and Development, 1964