A LabVIEW™-based scanning and control system for proton beam micromachining
- 1 July 2001
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 181 (1-4) , 49-53
- https://doi.org/10.1016/s0168-583x(01)00554-7
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A high resolution beam scanning system for deep ion beam lithographyNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1998
- Nuclear microprobe analysis and imaging: Current state of the art performancesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1998