Automatic characterization of layers stacks from reflectivity measurements. Application to the study of the validity conditions of grazing X-rays reflectometry
- 1 July 1990
- journal article
- Published by IOP Publishing in Journal of Optics
- Vol. 21 (4) , 183-191
- https://doi.org/10.1088/0150-536x/21/4/005
Abstract
The authors describe in this paper an algorithm to determine automatically the parameters of a stack from experimental reflectivity measurement. Their worked out code allows them to study the influence of different experimental conditions, such as experimental Poisson's noise or a systematical experimental error, on the validity of the results. Their method is used to study stacks by grazing soft X-rays reflectometry.Keywords
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