Substrate temperature effects on film chemistry in plasma depositions of organics. II. Polymerizable precursors
- 1 October 1992
- journal article
- research article
- Published by Wiley in Journal of Polymer Science Part A: Polymer Chemistry
- Vol. 30 (11) , 2415-2425
- https://doi.org/10.1002/pola.1992.080301116
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