Coplanar SIMMWIC circuits
- 1 July 1991
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- p. 129-139
- https://doi.org/10.1117/12.44488
Abstract
Using silicon as the substrate material SIMMWIC (Silicon Monolithic Millimeter Wave Integrated Circuit) oscillators and receivers are successfully realized. For the coplanar oscillators a slot is used as the resonant structure in which a monolithically integrated IMPATT diode selectively grown by Silicon molecular beam epitaxy (Si-MBE) acts as the negative resistance device. Pulsed and CW operation of the planar oscillators is achieved in the 90 GHz region. The output power is either radiated from a planar Vivaldi antenna or directly from the resonant slot. Complete receivers with monolithic Schottky diodes together with the antenna are integrated on a single chip.Keywords
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