Study of impurities in CVD diamond using cathodoluminescence
- 1 December 1991
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- p. 199-206
- https://doi.org/10.1117/12.48294
Abstract
Nitrogen ions were implanted into diamond films formed by microwave plasma CVD. A color cathodoluminescence (CL) system were used to investigate the emission centers of as implanted and the subsequent annealed films. A zero-phono-line (ZPL) from the implanted N+ was observed at 3.19 eV. After annealing, a ZPL at 2.16 eV and a strong emission center in the violet region with a ZPL at 3.19 eV and phonon replicas were observed. The color CL images of the annealed films show that an orange-red color emission comes only from the {100} sectors because of the difference in crystal quality between the {100} and {111} sectors.Keywords
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