A plasma-based technique for controlled low energy ion bombardment of dielectric surfaces
- 1 October 1993
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 59 (1-3) , 239-243
- https://doi.org/10.1016/0257-8972(93)90090-b
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Modeling for rf discharge characteristicsJournal of Applied Physics, 1988
- Distortion of na-concentration profiles in thin glassy surface layers by ion bombardmentRadiation Effects, 1976
- Electron cyclotron wave resonances and power absorption effects in electrodeless low pressure h.f. plasmas with a superimposed static magnetic fieldPlasma Physics, 1974