Structural Control of Epitaxially Grown Sputtered PbTiO3 Thin Films
- 1 September 1995
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 34 (9S)
- https://doi.org/10.1143/jjap.34.5132
Abstract
Microstructures of sputtered PbTiO3 films on SrTiO3 substrates have been studied. It is known that the epitaxial PbTiO3 films include microstructures. It was found that the formation of these microstructures was strongly influenced by the off-stoichiometry of the sputtered films and substrate surface microstructures. Sputtering under the stoichiometric condition on miscut (001)SrTiO3 led to the growth of ultrathin single-crystal PbTiO3 films 10-100 nm thick with continuous structure; under the off-stoichiometric condition the sputtered films comprised microstructures with screwlike dislocation. The ultrathin films exhibited lattice distortion which modified their ferroelectric properties.Keywords
This publication has 7 references indexed in Scilit:
- Effects of PLT-buffer layer on microstructures of sputtered PLZT thin films epitaxially grown on sapphireJournal of Materials Research, 1994
- Domain configurations due to multiple misfit relaxation mechanisms in epitaxial ferroelectric thin films. II. Experimental verification and implicationsJournal of Applied Physics, 1994
- Sputter deposition technology as a materials engineeringBulletin of Materials Science, 1993
- Single-Crystal Epitaxial Thin Films of the Isotropic Metallic Oxides Sr
1–
x
Ca
x
RuO 3 (0 ≤ × ≤ 1)Science, 1992
- Strain relaxation by domain formation in epitaxial ferroelectric thin filmsPhysical Review Letters, 1992
- Stress induced shift of the Curie point in epitaxial PbTiO3 thin filmsApplied Physics Letters, 1991
- Dependence of the Crystal Structure on Particle Size in Barium TitanateJournal of the American Ceramic Society, 1989