Effects of post-deposition annealing ambient on the electrical characteristics and phase transformation kinetics of sputtered lead zirconate titanate (65/35) thin film capacitors
- 1 July 1992
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 10 (4) , 1562-1568
- https://doi.org/10.1116/1.578045
Abstract
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