Method of optimizing registration signals for electron-beam microfabrication

• 1 May 1978
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 15  (3) , 901-905
• https://doi.org/10.1116/1.569624

Abstract

Keywords

• BEAM MICROFABRICATION
• SIGNALS FOR ELECTRON
• OPTIMIZING REGISTRATION SIGNALS