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Direct writing with the scanning tunneling microscope
Home
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Direct writing with the scanning tunneling microscope
Direct writing with the scanning tunneling microscope
EE
E. E. Ehrichs
E. E. Ehrichs
RS
R. M. Silver
R. M. Silver
A. L. de Lozanne
A. L. de Lozanne
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1 March 1988
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 6
(2)
,
540-543
https://doi.org/10.1116/1.575378
Abstract
A scanning tunneling microscope has been used to write metallic features directly on metallic and semiconducting surfaces without further process steps. Organometallic gases were used to obtain features as small as 20 nm.
Keywords
SCANNING TUNNELING MICROSCOPE
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