Valency control of P-type a-SiC:H having the optical band gap more than 2.5 eV by electron-cyclotron resonance CVD (ECR CVD)
- 1 December 1987
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 97-98, 1079-1082
- https://doi.org/10.1016/0022-3093(87)90259-6
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit: