A micromachined, silicon mass-air-flow sensor for automotive applications
- 9 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
A micromachined, monolithic silicon mass-air-flow sensor has been developed for measuring engine intake air flows in the range of 1-60 m/s. It has a response time of under 1 ms and can be temperature compensated to a deviation of +or-3.5% error or less in indicated flow over a temperature range of -30 degrees C to +40 degrees C. The device can withstand bombardment by particles up to 50- mu m in size in the air stream, or larger ones if elements with reduced accuracy are used. A more rugged design, using larger silicon beams but retaining good temperature compensation capability, can be achieved by modifying the beam ends and their support to increase the thermal isolation between the beams and the rest of the silicon chip.Keywords
This publication has 5 references indexed in Scilit:
- A Hot Wire Air Flow Meter for Intake Air Flow MeasurementPublished by SAE International ,1989
- Anti-Dirt Property of Hot-Wire Air Flow MeterPublished by SAE International ,1983
- Silicon as a mechanical materialProceedings of the IEEE, 1982
- Dynamic characteristics of a simple constant-temperature hot-wire anemometerReview of Scientific Instruments, 1979
- Heat transfer from spheres to flowing mediaPhysica, 1946