GaN-based epitaxy on silicon: stress measurements

• 15 October 2003
• journal article
• research article
• Published by Wiley in Physica Status Solidi (a)
• Vol. 200  (1) , 26-35
• https://doi.org/10.1002/pssa.200303428

Abstract

Keywords

• 62.20.FE
• 81.05.EA
• 81.15.GH