Radiolysis of resist polymers. 2. Poly(haloalkylmethacrylates) and copolymers with methyl methacrylate
- 1 December 1984
- journal article
- Published by American Chemical Society (ACS) in Macromolecules
- Vol. 17 (12) , 2756-2761
- https://doi.org/10.1021/ma00142a055