Thermal Oxidation of Silicon in Dry Oxygen: Accurate Determination of the Kinetic Rate Constants
- 1 July 1985
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 132 (7) , 1745-1753
- https://doi.org/10.1149/1.2114204
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: