Dynamical method for the thermomechanical study of thin membranes

• 1 November 1989
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 7  (6) , 1565-1569
• https://doi.org/10.1116/1.584490

Abstract

Keywords

• DYNAMICAL METHOD
• THERMOMECHANICAL STUDY
• THIN MEMBRANES
• STUDY OF THIN