50-nm x-ray lithography using synchrotron radiation

• 1 November 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (6) , 3959-3964
• https://doi.org/10.1116/1.587410

Abstract

Keywords

• SYNCHROTRON RADIATION
• USING SYNCHROTRON
• RAY LITHOGRAPHY
• LITHOGRAPHY USING
• NM X RAY