Progress towards a physical contact model for scanning spreading resistance microscopy
- 1 September 2003
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 102 (1-3) , 132-137
- https://doi.org/10.1016/s0921-5107(03)00019-9
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Quantification of nanospreading resistance profiling dataJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1998
- One- and two-dimensional carrier profiling in semiconductors by nanospreading resistance profilingJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Recent insights into the physical modeling of the spreading resistance point contactJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996