Humidity sensitivity of optical structures prepared by r.f.-biased r.f. sputtering
- 1 October 1981
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 85 (1) , 71-75
- https://doi.org/10.1016/0040-6090(81)90056-0
Abstract
No abstract availableKeywords
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