Metastable single-phase polycrystalline aluminium oxynitride films grown by MSIP: constitution and structure
- 1 September 1996
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 283 (1-2) , 37-44
- https://doi.org/10.1016/0040-6090(95)08256-5
Abstract
No abstract availableKeywords
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