Reactive Ion Etching of AI(Cu) Alloys

This publication has 4 references indexed in Scilit:

• Plasma-Assisted Etching of Aluminum and Aluminum Alloys
  Published by Elsevier ,1984
• Copper distribution in sputtered Al/Cu films
  Journal of Vacuum Science and Technology, 1980
• Intermetallic compounds of Al and transitions metals: Effect of electromigration in 1–2-μm-wide lines
  Journal of Applied Physics, 1978
• SLT Device Metallurgy and its Monolithic Extension
  IBM Journal of Research and Development, 1969