The Use of Metalorganics in the Preparation of Semiconductor Materials

• 1 January 1971
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 118  (11) , 1864-1868
• https://doi.org/10.1149/1.2407853

Abstract

Keywords

• ALUMINIUM COMPOUNDS
• NITROGEN COMPOUNDS
• GALLIUM COMPOUNDS
• CRYSTAL GROWTH
• CHEMICAL VAPOUR DEPOSITION
• III-V SEMICONDUCTORS
• ORGANIC COMPOUNDS
• HETEROEPITAXY
• FILMS
• INSULATING SUBSTRATES
• CHEMICAL VAPOR DEPOSITION