The effect of reflected and secondary electrons on lithography with the scanning tunneling microscope
Open Access
- 1 March 1987
- journal article
- Published by Elsevier in Surface Science
- Vol. 181 (1-2) , 278-284
- https://doi.org/10.1016/0039-6028(87)90168-3
Abstract
No abstract availableKeywords
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- Energy Spectra of Secondary Electrons from Mo and W for Low Primary EnergiesPhysical Review B, 1956
- Secondary electron emission: Part II. Absorption of secondary electronsPhysica, 1938