Control of etch profile for fabrication of Si microsensors

• 1 May 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 14  (3) , 1189-1193
• https://doi.org/10.1116/1.580264

Abstract

Keywords

• SI MICROSENSORS
• ETCH PROFILE
• CONTROL OF ETCH
• PROFILE FOR FABRICATION