Linewidth Measurement by a New Scanning Tunneling Microscope
- 1 November 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (11R)
- https://doi.org/10.1143/jjap.28.2402
Abstract
We have developed a new STM using monolithic parallel spring mechanisms with fiexture hinges. The STM is equipped with a two-dimensional optical interferometer to calibrate the motion of the scanner with subnanometer accuracy in real time. Distortion-free images of a grating pattern have successfully been observed.Keywords
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