Surface analysis of semiconductors with SIMS
- 1 January 1984
- journal article
- other
- Published by Elsevier in TrAC Trends in Analytical Chemistry
- Vol. 3 (5) , 133-139
- https://doi.org/10.1016/0165-9936(84)80012-6
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Sputter Depth Profiling of Microelectronic StructuresJournal of the Electrochemical Society, 1983
- Quantitative distribution analysis of dopant elements in silicon with SIMS for the improvement of process modellingAnalytical and Bioanalytical Chemistry, 1983